Understand the reference fab assumptions

Read the assumptions behind the reference fab and its model inputs.

The reference fab in vFactory represents a 300 mm logic fab. This explanation applies to Cloud 2.1.2.10 and Windows 2.1.2.3.

Understand the reference fab assumptions

Read the assumptions behind the reference fab and its model inputs.

Model assumptions

  • 1. Reference tools
  • 2. assumed process data

Reference fab

  • 3. Reference fab

Connections

  • 1. Reference tools → 3. Reference fab: →
  • 2. assumed process data → 3. Reference fab: →

Tool counts

The default model contains 300 tools. Reference tools accepts a total from 200 to 400. Four EUV tools stay fixed while the other tool groups share the remaining total.

Process inputs

The model includes process times, product changeovers, failures, repairs and preventive maintenance. Time values use seconds unless another unit is named. These inputs determine how the example model behaves.

vFactory

The reference fab layout and process figures are illustrative assumptions, not data from a real fab.