Run your first process model in vFactory

Open Process models, check the example inputs, run the model and read the result.

Process models opens with an example wafer process. Check its inputs, run it and read the computed result.

Open Process models

  1. Open the product menu and choose vFactory, then Wafer Process & Fab.

  2. Select the Process models tab.

  3. In Model, keep Wafer process. The form starts with Planar layer example.

Check the inputs

  1. Review Material coefficients, Initial layers · surface first and Process sequence.

  2. The example sequence has three steps: Deposit doped film, Anneal layers and Selective film etch.

  3. Open Model assumptions and units to read the units and the scope of the model.

The Process models tab with Model set to Wafer process. Model assumptions and units is open, followed by Material coefficients for substrate and film, Initial layers · surface first and the start of Process sequence. The result pane says No computed results yet.

Before the first run, review the example's assumptions and units, material coefficients and initial layers. No result is shown yet.

Run the model

  1. Select Run simulation (the play button) in the toolbar.

  2. While the model runs, the status shows Computing the supplied model…. To stop the run, select Cancel simulation.

  3. When the status shows Simulation complete, the result appears next to the inputs, with Log concentration and Inspect process stage.

Process models after a run. The status bar shows Simulation complete, and Process execution provenance shows the run as completed. Computed results shows the stage 3. Selective film etch with its thickness, dose and cell count, a chart of concentration by depth and the Process history and conservation table.

After Simulation complete, the result shows the selected process stage, a concentration profile by depth and the process history. Process execution provenance shows the run as completed.

If you change an input after a run, the status shows Inputs changed. Select Run simulation again to update the result.

Process models after an input change. An Inputs changed banner says that the displayed result belongs to an earlier input and that you should run the updated model to refresh it. The diffusion step Anneal layers now has Duration (s) 60, and the earlier result stays on the right.

The Inputs changed banner marks the result on the right as one from the earlier input until you run the model again.

If the run does not complete

Simulation did not complete appears with a message that explains the problem. Follow the message’s instructions, then run the model again.

Run simulation is unavailable while a run or a project file operation is in progress.

When the project files are unavailable, Run simulation cannot be used. Reconnect the project, then run the model.

If Project changed appears, follow its message: Open a process document in this project or start a new one.

Save the inputs and result

  1. Save input saves the current inputs as a JSON file.

  2. Export results is available after a run and saves the inputs together with the result.

  3. To try a fab model next, choose Fab simulation in Model. It starts from Reentrant fab example.

Use vFactory: explore a fab and follow a design to wafer

Example inputs are synthetic assumptions. Results simulate the supplied model, not measured production data.