Scene defaults
Look up initial wafer, walking and environment values, their units and accepted ranges.
This reference applies to vFactory in Cloud 2.1.2.10 and Windows 2.1.2.3.
New scenes start with these wafer, walking and environment values. Open Fab settings to edit them.
Wafer and walking values
Wafer fields are under Floor and wafer. Walking fields are under Walk.
Field | Default; accepted range |
|---|---|
Wafer diameter | 300 mm; 25–450 mm |
Wafer thickness | 0.775 mm; 0.1–2 mm |
Load-port wafer height | 900 mm; 0–3000 mm |
Eye height | 1.6 m; 1–2.2 m |
Body radius | 300 mm; 150–600 mm |
Walking speed | 1.4 m/s; 0.2–5 m/s |
Turn rate | 90 °/s; 15–360 °/s |
Environment values
Open Environment for the recorded scene environment values.
Field | Default; accepted range |
|---|---|
Ambient temperature | 21 °C; 15–30 °C |
Relative humidity | 45 %RH; 20–70 %RH |
Airborne particle cleanliness (dust) | ISO 14644-1 class 5; classes 1–9, whole numbers |
Downflow air velocity | 0.4 m/s; 0–1 m/s |
Room pressure differential | 15 Pa; 0–50 Pa |
Coordinates and stored units
Stored lengths use millimetres and angles use degrees. The origin is the south-west floor corner: X points east, Y north and Z up from the floor.
Related guides
Open the reference fab in vFactory
Reference-fab layouts, process data and results use example assumptions.