Attach a computed device result to a DUV wafer

Import and review a computed MOS or PN device receipt, then attach it to the current DUV wafer. These steps apply to Cloud 2.1.2.10 and Windows 2.1.2.3.

Import a receipt

  1. In vFactory, open Process models > DUV process link and select Run DUV segment.

  2. Wait for Modeled segment complete, then select Import a computed device receipt and choose the receipt JSON file.

  3. The application verifies file integrity and checks the project, source revision, wafer inputs and result, device model and selected depth window against the current flow.

Review and attach

  1. Review Linked wafer device results, including the device type, wafer identifier, depth window and computed values.

  2. Select Attach device result to attach the verified receipt, or Keep current wafer results to close the pending receipt and keep the current results.

  3. Open Device source and model limits to inspect the source revision, engine identity and input and result hashes.

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