Run and save a linked DUV process

Connect wafer stages to fab equipment, run the DUV segment, and save the flow locally or in the selected project. These steps apply to Cloud 2.1.2.10 and Windows 2.1.2.3.

Open the DUV workbench

  1. In vFactory, select Process models, then choose DUV process link.

  2. On Cloud, expand Edit mapped model inputs in a form to change the wafer recipe and fab equipment inputs. On Windows, expand the first Edit mapped model inputs section for these forms.

  3. For JSON editing on Cloud, expand Edit mapped model inputs as JSON. On Windows, expand the lower Edit mapped model inputs section containing Model input JSON. Edit the JSON and select Apply model inputs. The editable fields are wafer, fab, mapping, waferId, lotId and routeId.

Run and inspect the segment

  1. Select Run DUV segment to compute the wafer and fab models. During execution, select Cancel DUV segment to stop.

  2. When Modeled segment complete appears, select a stage in DUV stage mapping to inspect its equipment, schedule and computed profile in the scaled fab scene.

  3. Expand Process execution provenance to inspect the selected stage and wafer and fab engine identities.

Save and open local files

  1. Open More actions > Save DUV flow file. In both Cloud and Windows, this starts a download named duv-flow.alcad-duv-fab.json.

  2. Choose More actions > Open DUV flow file and select a saved JSON flow. If the current flow has changes without a confirmed file save, choose Replace DUV flow or Keep current DUV flow.

  3. To connect a scaled scene, choose More actions > Use scaled scene file and select its scene JSON file.

Save and open project files

Use the selected project with an active file session and permission to save its files. On Cloud, stop the project runtime before saving. Project operations check the project, session and source revision.

  1. Select Save DUV flow as project file, enter a new Project document filename, such as duv-flow.alcad-fab-scene.json, and select Save project document.

  2. Select Open DUV flow from project, choose a Project document, and select Open project document. If a draft has unsaved changes, select Replace the current unsaved draft with this file. before opening.

  3. After opening or saving a project file, select Save DUV flow to project to update that file. For a new flow, this control opens the filename dialog. Use Save DUV flow as project file with a different filename to create another file.

  4. Wait for the save confirmation. The application checks the existing file version before replacement and reads the saved content back to verify it.

Run your first process model in vFactory