EUV clip parameters
Look up clip-planning defaults and optical request values for local EUV imaging.
This reference applies to vFactory in Cloud 2.1.2.10 and Windows 2.1.2.3.
EUV clip sets up local imaging of imported GDS geometry. Geometry and cuts use mask nm. Supply explicit optics for local imaging.
Clip planning
The planner rounds the halo up to a whole raster interval. A run accepts up to 64 tiles.
Field | Initial value after import |
|---|---|
Layer and datatype | The first imported polygon’s layer. |
Region X (mask nm), Region Y (mask nm) | Minimum X and Y of the first imported polygon. |
Region width (mask nm), Region height (mask nm) | The first polygon’s extent, bounded to 4–512 nm on each axis. |
Raster resolution (mask nm) | 4 |
Halo (mask nm) | 32 |
Tile size (mask nm) | 512 |
Optical request
The ranges below are the values shown by the numeric inputs. Defocus values are distinct finite numbers separated by commas.
Field | Initial value; input values |
|---|---|
Wavelength (nm) | 13.5; from 0.001 |
Numerical aperture | 0.33; 0.001–0.55 |
Obscuration | 0; 0–0.999 |
Illumination source | Conventional; Conventional, Annular, Dipole, Quadrupole, Pixel source |
Defocus list (nm) | 0; 1–32 values |
Threshold (Iref = 1) | 0.5; from 0.001 |
Output grid width, Output grid height | 64 each; whole numbers from 2 to 512 |
Advanced optical settings
Explicit optics (JSON) contains stack, absorber, chiefRayDeg, polarization, transport and reflectionPlaneNm. The ambient index is {re: 1, im: 0}; polarization is x or y; transport is ideal-vector-v1 or euvlitho-vector-v1.
Zernikes (JSON) accepts up to 37 terms with distinct Noll indices from 1 to 37 and coefficientWaves in waves. Pixel source points (JSON) accepts 1–256 points within the unit pupil, with nonnegative weights and a positive total.
Numerics (JSON; null uses engine default) accepts null, or refinements of 2 or 3 with an optional method of abbe, hopkins or socs. Mask sampling (JSON; null uses engine default) accepts null, continuous sampling, or pixel sampling with whole-number width and height from 1 to 8192.
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