Calculate your first EUV budget in vFactory
Review the source and scan inputs, calculate an EUV budget and read the optical and photon results.
The EUV calculator runs locally in vFactory on Cloud or in the Windows app. Open vFactory with the guide below before you begin.
Open the reference fab in vFactory
Review the inputs
Select the EUV calculation tab.
For a first calculation, keep the initial source preset and input values.
Review Dose and scan assumptions and Photon assumptions. On Cloud, expand Sources and assumptions to check each input's source or assumption. On Windows, check the tag beside each input's range.
The initial RIKEN 2026 · Single beam preset. Sources and assumptions shows whether each input comes from the RIKEN 2026 experiment or is an assumption.
Calculate the budget
Choose Calculate EUV.
When EUV calculation complete. appears, read Light budget for the power along the optical path and the dose and timing results.
Read Planar optical response for reflectance by wavelength and angle. Read Photon budget and noise for photon counts and ideal Poisson variance.
After Calculate EUV, Light budget shows the power at each stage of the optical path, from the drive laser to the wafer.
Change an input
Changing an input clears the previous result. Enter values within the ranges displayed by the fields, then choose Calculate EUV again.
The outputs are calculations from the supplied inputs and assumptions, not measured scanner throughput, spectra or production data.