Pause and resume DUV stages
Create a checkpoint after each completed planar DUV stage, pause at a stage boundary, and continue from the next stage. These steps apply to Cloud 2.1.2.10 and Windows 2.1.2.3.
Start a staged run
In vFactory, open Process models, then choose DUV process link.
Use a planar flow with deposition, diffusion, thermal ramp or etch stages. Open More actions and select Run with stage checkpoints. A checkpoint records each completed stage.
Pause and continue
On Cloud, select Pause after this stage beside the running progress. On Windows, open More actions and select Pause after this stage.
Wait for the current stage to finish. The retained checkpoint identifies the completed stage.
Open More actions and select Resume next stage to continue with the next unfinished stage using the retained profile and elapsed time.
Keep a checkpoint
During a run, Cancel DUV segment stops execution and retains completed checkpoints. More actions > Save DUV flow file includes the checkpoint in the flow file.
Keep the wafer and fab inputs, stage mapping, wafer, lot and route identifiers unchanged for resume. The application checks the checkpoint input and result hashes and the engine identity before continuing.