Calculate an EUV optics and photon budget

Use EUV calculation in Cloud 2.1.2.10 or Windows 2.1.2.3 to compare model inputs and results.

Run the calculation

Open EUV calculation in vFactory and choose a source preset.

Review Mo/Si multilayer + Ru cap, Dose and scan assumptions and Photon assumptions. Keep each value within its displayed range.

Select Calculate EUV.

The Mo/Si multilayer + Ru cap inputs (Mo/Si periods, Mo, Si and Ru cap thickness, Incidence from normal at 0°, and the illuminator, mask and projection reflections), the first Dose and scan assumptions inputs, the dose and scan results, and a Planar optical response chart of reflectance against wavelength for s and p polarization.

The multilayer inputs define the reflectivity model. After a calculation, Planar optical response plots the reflectance for s and p polarization against wavelength.

Read the results

Light budget shows power by stage, dose, scan speed and wafers per hour.

Planar optical response shows s and p reflectance by wavelength and angle, and R / T / A at 13.5 nm. Open Wavelength data table or Angle data table for exact values.

Photon budget and noise shows photon energy, mean counts and ideal Poisson variance. Review Sources and assumptions alongside the results.

Results after Calculate EUV: the R / T / A at 13.5 nm table with the same reflectance, transmittance and absorption for s and p polarization, and the Photon budget and noise table for 20 mJ/cm² over 100 nm² with an absorbed fraction of 0.5, listing the photon energy, the incident and absorbed mean photon counts and their ideal Poisson variance.

Photon budget and noise compares the incident and absorbed photon counts with their ideal Poisson variance at 13.5 nm.

vFactory

These are assumption-based model outputs, not measured equipment throughput or predictions for a real fab. The wavelength sweep keeps the 13.5 nm optical indices fixed; ideal Poisson statistics do not predict resist defects or yield.