Open the reference fab in vFactory

vFactory opens with an example reference fab: a 300 mm logic fab laid out from public structure knowledge and our own assumptions. Use it to learn the fab views before you work with your own models.

Open vFactory

1. In a Digital Design Studio, ALcad or vFactory window, open the product menu in the window header.

2. Choose vFactory, then Wafer Process & Fab.

3. Select the Reference fab tab if it is not already selected. The other tabs are Process models, Design to wafer, EUV calculation and EUV clip.

Change the view

1. The reference fab opens in 3D map.

2. Use the view buttons in the scene toolbar to switch between 2D map, 3D map, Top view, Walk and Dollhouse.

If the device cannot draw the 3D views, the scene shows the true-scale plan with the message 3D acceleration unavailable · showing the true-scale plan.

Check the layout and assumptions

1. Select Fab settings (the gear button) in the scene toolbar.

2. The panel shows Our reference fab and 300 mm logic fab · public structure, our assumptions.

3. Read the summary below it: Reconstruction · assumptions, the numbers of tools, tool groups, zones and OHT ports, and 4 EUV · assumed process data.

Fab settings labels the reference fab as a reconstruction based on assumptions and summarizes its tools, tool groups, zones, OHT ports and EUV tools.

Change the number of tools

1. In Fab settings, open Fab setup.

2. Enter a number from 200 to 400 in Reference tools. The default is 300.

3. Select Open reference fab. The reference fab is laid out again with that number of tools, and the summary changes to match.

In 2D map, the reference fab is drawn as a true-scale plan. Fab setup shows Reference tools at the default of 300.

A number outside that range shows Choose 200–400 tools.

Export simulation model saves the reference fab model as a JSON file.

Use vFactory: explore a fab and follow a design to wafer

The reference fab is an example. Its layout and process data are assumptions, not data from a real fab.