Place equipment and edit route waypoints

Move, rotate and remove equipment placements in the fab scene, then add and move route waypoints.

Open the placement controls

These steps apply to Cloud and Windows 2.1.2.3. From the product menu, select vFactory → Wafer Process & Fab. Select Process models, choose Fab simulation under Model, then select Scaled fab scene (preview). Select 2D map in the scene toolbar and open Fab settings.

Place and move equipment

  1. Under Equipment slots, select a process slot. For an unplaced slot, select Place in scene under Selection.

  2. Drag a placed tool in the 2D plan to move it on the snap grid. For numeric positioning, edit East (X) and North (Y) under Selection; these coordinates use metres.

  3. With the scene viewport focused, press an arrow key to move the selection by the snap grid. Hold Shift with an arrow key to move it by 10 mm.

Rotate or remove a placement

  1. Select a placed tool and edit Rotation, or select Rotate 90° clockwise or Rotate 90° counter-clockwise.

  2. Select Remove placement to return that tool's process slot to an unplaced state. Select the slot in Equipment slots and choose Place in scene to place it again.

  3. Use Undo scene edit or Redo scene edit to step through scene edits.

Edit route waypoints

  1. Expand Routes and choose a Route. For a leg joining two placed equipment groups, select Add waypoint.

  2. Drag the waypoint marker in the 2D plan, or focus the viewport and move the selected waypoint with the arrow keys.

  3. Select a waypoint button in Routes, then select Remove waypoint under Selection to remove that waypoint.

Save the scene after editing its equipment and waypoints.