Understand the EUV structure model and calculations

Distinguish the educational structure model from optical-budget results and read each view's assumptions.

vFactory's EUV structure view and calculator answer different questions. Both are available on Cloud and in the Windows app.

EUV structure and optical calculations

Distinguish the educational structure model from optical-budget results and read each view's assumptions.

Inputs

  • 1. Reconstruction · assumptions: public structure, assumed sizes
  • 3. Optical inputs

Model / action

  • 2. Educational reconstruction
  • 4. Calculate EUV

Results

  • 5. Light budget
  • 6. Planar optical response
  • 7. Photon budget and noise

Connections

  • 1. Reconstruction · assumptions: public structure, assumed sizes → 2. Educational reconstruction: →
  • 3. Optical inputs → 4. Calculate EUV: →
  • 4. Calculate EUV → 5. Light budget: →
  • 4. Calculate EUV → 6. Planar optical response: →
  • 4. Calculate EUV → 7. Photon budget and noise: →

Use vFactory: explore a fab and follow a design to wafer

What the structure model shows

The inside view in Reference fab shows an educational reconstruction of a scanner. It helps you follow the optical path and identify components.

The model's geometry and component arrangement draw on public information and assumptions. Choose Sources in the inside view to read the referenced material.

What the optical budget calculates

EUV calculation uses the source, multilayer, dose, scan and photon inputs you supply. It calculates power along the optical path, planar optical response, and photon counts with ideal Poisson variance.

Changing an input clears the previous result. Calculate again to get a result for the new inputs.

Read the assumptions with the result

On Cloud, expand Sources and assumptions to check each input's source or assumption. On Windows, check the tag beside each input's range. Keep the input values with any comparison you make between calculations.

A structural view explains the model's arrangement; a budget gives computed values for its inputs. Read each with its own assumptions.

The structure model is a reconstruction, and calculation results depend on the supplied assumptions; they are not measurements of a real scanner or fab.