Look inside the EUV model in vFactory

Open an EUV scanner's inside view, follow its optical path and read its sources.

Use the EUV Structure Lab to inspect an educational scanner model on Cloud or in the Windows app. Open the reference fab with the guide below before you begin.

Open the reference fab in vFactory

Open the inside view

  1. On Cloud, choose 3D map in the reference fab scene toolbar and select an EUV scanner. In Windows, choose Walk, click in the 3D fab view to focus it, and use W/S and A/D to approach an EUV scanner.

  2. Choose the scanner's inside-view action when it appears, such as Look inside · EUV scanner 1 for scanner 1.

Read the model

The inside view opens with the shell hidden and the full optical path in view. Component labels help you follow the path through the model.

  1. Read the model notice in the view.

  2. Choose Sources to read the referenced material.

EUV scanner 1 inside view in the EUV Structure Lab: a High-NA · 0.55 NA scanner model with the shell hidden and purple EUV light paths, the How to use and Sources buttons, the Shell checkbox cleared and Light paths and Names checked, and a Notes panel tagged Public structure · conceptual reconstruction.

The inside view of EUV scanner 1 with the light paths shown. The Notes panel labels the model as a public structure and a conceptual reconstruction.

Return to the fab

Choose Close inside view to return to the fab scene.

The EUV structure is an educational reconstruction from public information and assumptions, not measured equipment data.