Run a seeded fab model with batches and maintenance

Set the seed, edit batch and preventive maintenance inputs, run the model and compare tool state shares.

Run the seeded batch example, add preventive maintenance and compare the completed run. These steps apply to Cloud 2.1.2.10 and Windows 2.1.2.3.

Open the seeded model

  1. Open the product menu and choose vFactory → Wafer Process & Fab. Select Process models.

  2. In Model, choose Seeded fab simulation (v2). The example starts with seed 17, a 3600-second horizon and the batch-formation dispatch rule.

  3. Set Random seed to a nonnegative integer and Simulation horizon (s) to a positive duration. Keep the same seed and inputs when comparing repeated runs with the same engine.

Edit batches and maintenance

  1. On Cloud, expand Advanced inputs. On Windows, the section controls are already visible. In Model section, choose Equipment, batches, setups, failures and PM.

  2. In Section JSON, review the furnace batch: minSize: 2, maxSize: 4 and maxWaitS: 60. This example counts lots. A batch waits for its minimum size until the oldest waiting lot reaches the maximum wait; available capacity still controls when it starts.

  3. Replace the furnace’s empty pm array with the following array. Leave its other fields in place.

[{"everyS":900,"duration":{"kind":"constant","value":60}}]

This requests 60 seconds of maintenance every 900 seconds. For count-based maintenance instead, replace everyS: 900 with everyCount: 2. The default count basis is completed batches. Use exactly one recurrence field.

  1. Select Apply section. To return to the applied values, select Discard section edits. Apply or discard pending edits before running or switching sections.

Process models with Seeded fab simulation (v2): Factory model name Seeded batch example, Random seed 17, Simulation horizon (s) 3600 and Dispatch rule batch-formation. Advanced inputs is open, and Model section is set to Equipment, batches, setups, failures and PM. Section JSON shows the furnace batch with minSize 2, maxSize 4 and maxWaitS 60, and a pm entry with everyS 900 and a constant duration of 60. Apply section and Discard section edits are unavailable because the edit has been applied.

After Apply section, the furnace keeps its batch settings and has one maintenance entry: 60 seconds every 900 seconds. The seed and the horizon stay at 17 and 3600 seconds.

Run and read the result

  1. Select Run simulation. To stop a running calculation, select Cancel simulation.

  2. When Simulation complete appears, read Computed results, Completed lots and Completed wafers. In Tool state shares, compare processing, maintenance and idle time shares.

  3. Change one input, apply any section edits and run again. Inputs changed marks a displayed result from earlier inputs.

Computed results of the seeded run with the maintenance entry: P90 cycle time (s) 210, Output (wafers/day) 4800, X-factor 1.375, Completed lots: 8 · Completed wafers: 200 and Recorded events: 88. The Tool state shares table lists the furnace with processing 10.00%, setup 0.00%, down 0.00%, pm 5.00% and idle 85.00%.

Read Completed lots and Completed wafers, then compare the processing, pm and idle shares in Tool state shares. The values come from the synthetic example inputs.

For the basic process workflow, see Run your first process model in vFactory.

The example inputs are synthetic assumptions, not data from a real fab.